Surface and Materials Engineering for Microsystems Technology in Harsh Environment

October 30 2009
Types d’événements
Séminaire SPCSI
Prof. Roya Maboudian
SPEC Bât 466 p.111 (1er ét.)
Configuration de la salle en séminaire ou réunion
30 places
Vidéo Projecteur
30/10/2009
from 11:00

A number of industries such as automotive, health and energy require micro-sensors and actuators that can survive harsh environments, such as repetitive contact, high temperatures and relative humidity. This presentation examines the surface and interfacial behavior and limitations of silicon-based microelectromechanical systems in a variety of harsh environments. Particular phenomena to focus on include adhesion, friction and corrosion. Then, the effectiveness of self-assembled monolayers and silicon carbide for enhanced MEMS reliability under these conditions is discussed.

Invited by Patrick Soukiassian.

University of California – Berkeley