LICSEN is equipped for e-beam litography and has access to the clean room facility at CEA-SPEC (optical litography, wet and dry etching…). We also operate several SEMs and AFMs.
![](https://iramis.cea.fr/wp-content/uploads/2014/09/litho_licsen-1024x455.jpg)
Main contacts: Vincent Derycke
LICSEN is equipped for e-beam litography and has access to the clean room facility at CEA-SPEC (optical litography, wet and dry etching…). We also operate several SEMs and AFMs.
Main contacts: Vincent Derycke